SIASUN TSS-3000 EFEM (TSS-3000)
C$0.00
PART #:
TSS-3000
Stock Status:
In stock
AVAILABILITY:
CURRENTLY UNAVAILABLE
Product Code:
SIASUN-TSS-3000
Cleaning Robot - Small footprint, dual-arm robot with external axis, high transfer efficiency. EFEM is a front-end wafer transfer device and an interface system compatible with SEMI standards. It can transfer wafers manually or in conjunction with MR or OHT carrying levels. (TSS-3000)
| PART # | TSS-3000 |
|---|
SIASUN TSS-3000 EFEM (TSS-3000)